New Poly-Silicon TFT Partially Crystallized by Excimer Laser Irradiation through ITO Gate

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概要

• 論文の詳細を見る

• We propose the new poly-Si TFT structure which reduces the leakage current effectively employing highly resistive a-Si region in the channel. This new device has partially crystallized active layer, where both edges of channel region adjacent to source and drain are not crystallized and remain a-Si. In the fabrication of the proposed device, there are not additional photo masking steps and misalign problem. Another advalltage of the proposed device is increase of aperture ratio adopting the transparent

• 社団法人電子情報通信学会の論文
• 1997-02-13

著者

• Choi Hong-seok

  School Of Electrical Engineering Seoul National University

• Choi Kwon-Young

  School of Chemical and Biological Engineering, Institute of Molecular Biology and Genetics, Institut

• Han M‐k

  The Author Is With The School Of Electrical Engineering Seoul National University

• Park C‐m

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Choi K‐y

  Seoul National Univ. Seoul Kor

• Han M‐k

  Seoul Nat'l Univ. Seoul Kor

• JEON Jae-Hong

  The author is with the School of Electrical Engineering, Seoul National University

• Jeon Jae-Hong

  School of Electrical Engineering, Seoul National University

• Han Min-Koo

  School of Electrical Engineering, Seoul National University

• PARK Cheol-Min

  School of Electrical Engineering, Seoul National University

• Jeon J‐h

  Seoul National Univ. Seoul Kor

• Han Min-koo

  School Of Electrical Engineering And Computer Science #50 Seoul National University

• Park Cheol-min

  School Of Electrical Engineering Seoul National University

• Choi Hong-seok

  Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te

• Choi Kwon-young

  School Of Chemical And Biological Engineering Institute Of Molecular Biology And Genetics Institute

• Jun Jae-hong

  Department Of Electrical Engineering Seoul National University

• Jun Jae

  School Of Electrical Engineeririg Seoul National University

• Han Min-koo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Han Min-Koo

  School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea

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