Effect of Ga Doping on Transparent and Conductive Al-Doped ZnO Films Prepared Using Magnetron Cosputtering

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概要

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• Al-doped ZnO (AZO) films with various Ga contents were prepared by magnetron co-sputtering in order to investigate the effect of Ga additions on the structural and optoelectronic characteristics of AZO films. The appropriate Ga doping level improved the crystallinity of the AZO films, investigated by X-ray diffraction analysis. The resistivity of AZO films decreased from $3.5 \times 10^{-3}$ to $8.1 \times 10^{-4}$ $\Omega$ cm by Ga doping at 2.1 at. %. The Hall mobility was improved by enhancing the polycrystalline growth of the films. The carrier concentration was increased by Ga doping, which was activated as an extrinsic donor. At a further increase in the Ga content of more than 2.1 at. %, the crystallinity and resistivity of the Ga-doped AZO films deteriorated. The optical band gap was increased, and the transmittance in the visible region was increased from 86.7 to 91.0% using the same level of Ga doping at 2.1 at. %.

• 2010-12-25

著者

• Han Min-koo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Kim Sun-Jae

  School of Electrical Engineering, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea

• Moon Tae-Ho

  LG Electronics, Seoul 137-724, Republic of Korea

• Lee Heon-Min

  LG Electronics, Seoul 137-724, Republic of Korea

• Lee Heon-Min

  LG Electronics, Seoul 137-724, Korea

• Kang Dong-Won

  School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Han Min-Koo

  School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Kim Sun-Jae

  School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea

• Kim Sun-Jae

  School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Han Min-Koo

  School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea

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