Suppression of Leakage Current in Solid-Phase Crystallization Silicon Thin-Film Transistors Employing Off-State-Bias Annealing
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概要
- 論文の詳細を見る
We have fabricated p-channel metal oxide semiconductor (PMOS) solid-phase crystallization silicon (SPC-Si) thin-film transistors (TFTs) employing an alternating magnetic field on a glass substrate, which exhibit better current uniformity than excimer-laser annealed low-temperature polycrystalline silicon (ELA LTPS) TFTs, and superior stability to hydrogenated amorphous silicon (a-Si:H) TFTs. The leakage current of the SPC-Si TFT was larger than that of an a-Si:H TFT and an ELA poly-Si TFT owing to its many grain boundaries. The leakage current of the SPC-Si TFT was successfully suppressed through off-state-bias annealing. Off-state-bias annealing forced electron carriers to be trapped in the gate insulator, thus reducing the gate–drain field and suppressing the leakage current of the SPC-Si TFT. Our experimental result showed that the trapped electron charges in the gate insulator did not escape under thermal annealing or AC-bias stress. The off-state-bias annealed PMOS SPC-Si TFT could be a suitable pixel element for high-quality display applications employing an alternating magnetic field.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-11-25
著者
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Park Sang-Geun
School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea
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Lee Won-Kyu
School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea
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Lee Won-Kyu
School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea
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Kim Sun-Jae
School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea
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Han Min-Koo
School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea
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Han Min-Koo
School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea
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