High Voltage AlGaN/GaN High-Electron-Mobility Transistors Employing Surface Treatment by Deposition and Removal of Silicon Dioxide Layer
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概要
- 論文の詳細を見る
We have fabricated AlGaN/GaN high-electron-mobility transistors (HEMTs) employing the proposed surface treatment by the deposition and removal of a SiO2 layer. The proposed treatment was applied before the Schottky contact formation. The output DC characteristics of the conventional and proposed devices were almost identical. The same threshold voltage indicates that the deposited SiO2 layer on the proposed device was completely eliminated. The proposed device decreased its leakage current by more than three orders compared with the conventional device and achieved a high breakdown voltage of 1300 V. The improvement in the blocking characteristics of the proposed device is due to the suppression of buffer leakage current, which is induced by the elimination of native oxide and the effect of N2O plasma on the surface of the AlGaN/GaN heterostructure.
- 2010-04-25
著者
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Choi Young-hwan
School Of Electrical Eng. & Computer Science #50 Seoul National University
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Kim Sun-Jae
School of Electrical Engineering, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea
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Min-Koo Han
School of Electrical Engineering, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea
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Min-Ki Kim
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Kim Young-Shil
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Ogyun Seok
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Young-Shil Kim
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Kim Sun-Jae
School of Electrical Engineering (#50), Seoul National University, San 56-1, Gwanak-gu, Seoul 151-742, Korea
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Sun-Jae Kim
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Min-Koo Han
School of Electrical Engineering and Computer Science #50, Seoul National University, Gwanak 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Korea
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Min-Koo Han
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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Young-Hwan Choi
School of Electrical Engineering and Computer Science, Seoul National University, Gwanak-gu, Seoul 151-744, Korea
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