Novel L-Shaped Dual-Gate Structure of Polycrystalline Silicon Thin-Film Transistors for the Reduction of the Kink Current in Sequential Lateral Solidification or Continuous Wave Laser Method

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概要

• 論文の詳細を見る

• An L-shaped dual-gate device structure, which reduces kink current in polycrystalline silicon thin-film transistors (poly-Si TFTs), has been proposed and fabricated. In the proposed device, the poly-Si TFTs have a lateral grain growth in channels such as TFTs fabricated by sequential lateral solidification (SLS) or CW laser crystallization. The current flow of dual TFTs is strongly affected by grain boundaries showing lateral grain growth. The L-shaped dual gate structure is employed for asymmetry between dual channels. One of the channels is located in a parallel direction of grain growth and the other is located vertically. It is verified by experiment that the proposed L-shaped dual-gate TFT reduced the kink current of poly-Si TFT and showed improved reliability by fixed current flow in the saturation mode.

• 2006-05-30

著者

• Lee Won-kyu

  School Of Physics Seoul National University

• Han Min-koo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Shin Hee-Sun

  School of Electrical Engineering #50, Seoul National University, 151-742 Seoul, Korea

• Shin Hee-Sun

  School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea

• Jung Sang-Hoon

  LCD R&D Center, LG.Philips LCD, 533, Hogae-dong, Dongan-gu, Anyang-shi, Kyongki-do 431-080, Korea

• Nam Woo-Jin

  School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea

• Lee Hye-Jin

  School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea

• Jung Sang-Hoon

  LCD R&D Center, LG.Philips LCD, 533, Hogae-dong, Dongan-gu, Anyang-shi, Kyongki-do 431-080, Korea

• Lee Won-Kyu

  School of Electrical Engineering #50, Seoul National University, Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea

• Han Min-Koo

  School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea

• Nam Woo-Jin

  School of Electrical Engineering #50, Seoul National University, 151-742 Seoul, Korea

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