New Poly-Silicon TFT Partially Crystallized by Excimer Laser Irradiation through ITO Gate

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概要

• 論文の詳細を見る

• We propose the new poly-Si TFT structure which reduces the leakage current effectively employing highly resistive a-Si region in the channel. This new device has partially crystallized active layer, where both edges of channel region adjacent to source and drain are not crystallized and remain a-Si. In the fabrication of the proposed device, there are not additional photo masking steps and misalign problem. Another advantage of the proposed device is increase of aperture ratio adpting the transparent ITO gate

• 社団法人映像情報メディア学会の論文
• 1997-02-13

著者

• Choi Hong-seok

  School Of Electrical Engineering Seoul National University

• Choi Kwon-Young

  School of Chemical and Biological Engineering, Institute of Molecular Biology and Genetics, Institut

• Han M‐k

  The Author Is With The School Of Electrical Engineering Seoul National University

• Park C‐m

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Choi K‐y

  Seoul National Univ. Seoul Kor

• Han M‐k

  Seoul Nat'l Univ. Seoul Kor

• JEON Jae-Hong

  The author is with the School of Electrical Engineering, Seoul National University

• Jeon Jae-Hong

  School of Electrical Engineering, Seoul National University

• Han Min-Koo

  School of Electrical Engineering, Seoul National University

• PARK Cheol-Min

  School of Electrical Engineering, Seoul National University

• Jeon J‐h

  Seoul National Univ. Seoul Kor

• Han Min-koo

  School Of Electrical Engineering And Computer Science #50 Seoul National University

• Park Cheol-min

  School Of Electrical Engineering Seoul National University

• Choi Hong-seok

  Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te

• Choi Kwon-young

  School Of Chemical And Biological Engineering Institute Of Molecular Biology And Genetics Institute

• Jun Jae-hong

  Department Of Electrical Engineering Seoul National University

• Jun Jae

  School Of Electrical Engineeririg Seoul National University

• Han Min-koo

  School Of Electrical Eng. & Computer Science #50 Seoul National University

• Han Min-Koo

  School of Electrical al Engineering and Computer Science #50, Seoul National University, Seoul 151-742, Korea

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