P-1-13 超撥水表面を用いた水面移動ロボットの研究 : 表面微細構造と撥水性について(マイクロナノ理工学,ポスター要旨講演)

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This paper describes water-repellency of the microstructured surfaces, as a basic study for the development of supporting legs of water strider robots. To obtain super-water-repellent surfaces, micro pillars with various shapes were fabricated on silicon wafers by deep RIE (Reactive Ion Etching) and hydrophobic films were coated on the structures. The contact angles of these surfaces were measured and effects of shape, size, height and pitch of the pillars on contact angles were investigated experimentally. The surface with hexagonal micropillars exhibits water contact angle of 168 degrees. Pull-off force and fluid resistance of the water-repellent surfaces against water were also measured. The results show that water repellency has a significant effect on reducing the pull-off force.
2011-03-18