MNM-P5-1 MEMSを用いた静電容量式力覚センサの研究(P5 マイクロ・ナノ技術によるロボティクス・メカトロニクスの新展開)

概要

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In this paper, we assumed the development of the miniature robot with which the force sensor united with the robot to be the final purpose. As the former stage, we proposed the capacitive force sensor that used MEMS technology on the silicon wafer. I made the structure of the force sensor to produce capacitance type. Because the minute power from the vertical direction increases, distance between two pieces of conductive bodies changes, and system is such that I can detect a change of the capacitance. The force sensor devised the production process using PDMS in an insulator. By the experiment, I performed an experiment to detect a change of the capacitance by the imposition force with a plane table spring. As a result, the force sensor was able to detect a linear change of the capacitance by the imposition force by a change of 0.05pF per 100mN.
一般社団法人日本機械学会の論文
2010-10-12