振動法による薄膜のヤング率測定

概要

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Recently an increase in recording density of the hard disk drives has required reduction of less than 10 nm at the flying-height of the magnetic head sliders. The safety margin for the head/disk interface under those low flying-height conditions is likely to decrease with the thermal protrusion of a head element which is caused by the current of the writer coil and by a rise of the surrounding temperature. In order to reduce the thermal protrusion, it is effective to evaluate the thermal deformation of the head element in numerical simulation. And the simulation requires the physical properties of the thin film materials used for the head element. In this study, Young's modulus of the SiO_2 thin film, which had been considered to be a promising insulating material of the magnetic head, was measured in the resonance method. The resonant frequencies of the micro cantilevers made of SiO_2 thin film were measured in the way that a silicon wafer on which the cantilevers were integrated was oscillated by a piezoelectric actuator. And then Young's modulus of the SiO_2 thin film was derived from the resonant frequencies of the cantilevers. The results of the measurement showed that Young's modulus was41.2GPa.
工学院大学の論文
2005-10-30