Improved Reliability Characteristics of Ultrathin SiO_2 Grown by Low Temperature Ozone Oxidation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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HWANG Hyunsang
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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Hwang Hyunsang
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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Hwang Hyunsang
Department Of Materials Science Anti Engineering Kwangju Institute Of Science And Technology
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CHANG Hyo
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology
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Chang Hyo
Department Of Materials Science Anti Engineering Kwangju Institute Of Science And Technology
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Moon Dae
Nano Surface Group Korea Research Institute Of Standards And Science
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CHOI Sangmoo
Department of Materials Science anti Engineering, Kwangju Institute of Science and Technology
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Choi Sangmoo
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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Choi Sangmoo
Department Of Materials Science Anti Engineering Kwangju Institute Of Science And Technology
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