Effect of Plasma Nitridation on the Conduction Mechanism of Ta_2O_5 Gate Dielectric
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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Hwang Hyunsang
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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Im Kiju
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology
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Im Kiju
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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Lee Woo
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology
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Lee Woo
Department Of Applied Biological Chemistry Graduate School Of Agricultural And Life Sciences Univers
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Joen Sanghun
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology
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