Electrical Characteristics of Ozone-Oxidized HfO_2 Gate Dielectrics
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概要
- 論文の詳細を見る
- 2003-04-15
著者
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SIM Hyunjun
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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HWANG Hyunsang
Department of Materials Science and Engineering, Gwangju Institute of Science and Technology
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Sim Hyunjun
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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Sim Hyunjun
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology
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Hwang Hyunsang
Department Of Materials Science And Engineering Gwangju Institute Of Science And Technology
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CHANG Hyosik
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology
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Chang Hyosik
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology
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