1858 光導波路の伝播特性に及ぼす薄膜残留応力の影響(J09-4 有限要素解析と強度信頼性評価,J09 電子情報機器,電子デバイスの熱制御と強度・信頼性評価)

概要

論文の詳細を見る
Since the phase shift of a laser beam occurs due to the change of refractive index of a wave-guide caused by double refraction, the residual stress in a core layer of a thin-film optical wave-guide for optical integrated circuits was analyzed using a finite element method to discuss the deterioration of signal quality of a laser beam. Intrinsic stress of a clad thin film is the most important factor that determines the final residual stress in the core layer. The residual stress sometimes reaches several hundreds MPa and it may cause the serious retardation of a transmitted laser beam and thus, deteriorates the quality of the laser beam.
一般社団法人日本機械学会の論文
2005-09-18