1469 微細三角形貫通孔形成による銅メッキニ軸応力場測定の高感度化(S20-6 応力・ひずみ分布計測法(2),S20 実験力学的手法による材料・製品の評価)

概要

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In order to improve the sensitivity of stress measurement using an electroplated copper film, the surface structure of the film was observed using a SEM. A typical columnar structure with a diameter of about 0.5μm was observed and the thinning and recrystallization at around a tip of a slit formed in the film was confirmed after certain cycles of an uni-axial load. Growth of slip lines were observed only in the recrystallized large grains at a slit tip. Formation of triangular slits with different directions of symmetry axis is effective for detecting bi-axial stress fields under cyclic loading. The sensitivity of the stress measurement can be improved by about 30% comparing with that obtained using long slits.
社団法人日本機械学会の論文
2005-09-18