1201 めっき銅薄膜の疲労強度特性の熱履歴依存性(S05-1 ナノ・マイクロ材料の強度・信頼性(1)銅薄膜の強度物性,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

論文の詳細を見る
Effect of heat treatment on the fatigue strength of electroplated copper thin films was investigated. Test electroplated copper films were grown on stainless steel substrates by using acid copper sulfate bath without any additive agent. These films were annealed at 400℃ for 3 hours in argon atmosphere. Mechanical properties of annealed film were similar to that of bulk material because the grain size of the films was increased by annealing. It was also found that the fracture mode of the annealed films changed drastically. The annealed film showed ductile fracture though the initial film without annealing showed brittle fracture. The high cycle fatigue strength of the as-electroplated films was lower than that of the annealed films. This was because that the micro structure of the film consisted of fine columnar grains with weak grain boundaries.
社団法人日本機械学会の論文
2008-08-02