微細スリットを形成した銅メッキ膜を用いた二軸応力場測定方法の検討(材料力学I-2)

概要

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Stress and Strain fields around a tip of a micro slit in an electroplated copper film was analyzed using a finite element method to discuss the development of a method of stress measurement by observing the change of the surface texture of the film under bi-axial stress load. It was found that the principal strain at the slit tip changed sensitively with the change of the load perpendicular to the longitudinal direction of the slit. However, the maximum principal strain did not change when the load was applied parallel to the direction. In addition, when the applied load parallel to the direction was higher than that perpendicular to the direction, the change of the maximum principal strain was not a linear function of the applied stress.
社団法人日本機械学会の論文
2004-09-17