612 正三角形貫通孔による二次元銅メッキ応力測定法の検討(GS-12 材料力学)

概要

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In order to improve the sensitivity of stress measurement using an electroplated copper film, triangular slits with a side shorter than 100μm was formed in the film using a focused ion beam. The strain concentration at each edge enhances the change of the texture of the film, and thus, improves the sensitivity by about 30% comparing with that obtained from a film with a long slit. The electroplated film with triangular slits with different size and angle to an applied load was attached on the surface of a tapered rod, and a cyclic load was applied to the rod using a rotary bending test method. The texture change of the film at each edge was observed during the test. The minimum amplitude of the strain that causes the change of the film texture after 10^8 cycle load decreased from 400 μstrain to 100 μstrain. Since the rate of the texture change at each edge showed strong anisotropy depending on both the amplitude and direction of the cyclic load, it is possible to detect a two-dimensional strain field under an cyclic load in an attached film.
社団法人日本機械学会の論文
2005-09-09