Vertical-Cavity Surface-Emitting Laser Array on GaAs(311)B Substrate Exhibiting Single-Transverse Mode and Stable-Polarization Operation
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概要
- 論文の詳細を見る
We have demonstrated a single-transverse-mode and stable-polarization GaInAs/GaAs vertical-cavity surface-emitting laser (VCSEL) array grown on a GaAs(311)B substrate. A fabricated 3×3 VCSEL array consists of devices with an oxide aperture of 3.4μm×3.4μm and exhibited single-transverse mode operation with an injection current up to three times the threshold. The Side-mode suppression ratio (SMSR) is larger than 30 dB. The array also exhibits stable-polarization operation with an orthogonal polarization suppression ratio (OPSR) of over 25 dB. The threshold current was 0.61 ± 0.05 mA and the threshold voltage was 1.79±0.03V. The obtained uniform single-mode array characteristics are due to the high uniformity and controllability of the improved oxidation process.
- 社団法人応用物理学会の論文
- 2000-06-15
著者
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Koyama Fumio
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Iga Kenichi
Precision & Intelligence Lab., Tokyo Institute of Technology
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Azuchi Munechika
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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SHINADA Satoshi
Precision & Intelligence Laboratory, Tokyo Institute of Technology
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NISHIYAMA Nobuhiko
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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ARAI Masakazu
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Shinada S
National Institute Of Information And Communications Technology
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Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Tokyo Inst. Technol. Yokohama Jpn
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Matsutani Akihiro
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Murakami A
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Nishiyama N
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Precision And Intelligence Laboratory Microsystem Research Center Tokyo Institute Of Technology
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