Single High-Order Transverse Mode Surface Emitting Laser with Micromachined Surface Relief(Special Issue on Recent Progress of Integrated Photonic Devices)
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概要
- 論文の詳細を見る
We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.
- 社団法人電子情報通信学会の論文
- 2002-04-01
著者
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Koyama Fumio
Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
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Koyama Fumio
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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Koyama Fumio
Microsystem Research Center P&i Lab. Tokyo Institute Of Technology
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Arai Masakazu
Microsystem Research Center P&i Laboratory Tokyo Institute Of Technology
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Azuchi Munechika
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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SHINADA Satoshi
Microsystem Research Center, Precision & Intelligence Laboratory, Tokyo Institute of Technology
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NISHIYAMA Nobuhiko
Microsystem Research Center, Precision & Intelligence Laboratory, Tokyo Institute of Technology
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Shinada S
National Institute Of Information And Communications Technology
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Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Tokyo Inst. Technol. Yokohama Jpn
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Murakami A
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Nishiyama N
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Microsystem Research Center, P & I Lab., Tokyo Institute of Technology
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KOYAMA Fumio
Microsystem Research Center, Precision and Intelligence Laboratory, Tokyo Institute of Technology
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