Correlation Length Measurement of Sidewall Roughness of Dry Etched Facet and Its Effect on Reflectivity
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概要
- 論文の詳細を見る
- 1999-08-01
著者
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Koyama Fumio
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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MITSUGI Satoshi
NTT Basic Research Laboratories, NTT Corp.
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Mitsugi Satoshi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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MATSUTANI Akihiro
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Mitsugi S
Ntt Basic Research Laboratories Ntt Corp.
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Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Precision And Intelligence Laboratory Microsystem Research Center Tokyo Institute Of Technology
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