Mass Effect of Etching Gases in Vertical and Smooth Dry Etching of InP
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概要
- 論文の詳細を見る
- 2001-03-01
著者
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Koyama Fumio
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Iga K
Microsystem Research Center P & I Lab . Tokyo Institute Of Technology
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MATSUTANI Akihiro
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Iga Kenichi
Precision & Intelligence Lab., Tokyo Institute of Technology
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OHTSUKI Hideo
Samco International Inc.
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MUTA Seiichi
Samco International Inc.
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