Vertical and Smooth Microfabrication of InP Using Simple High-Density Plasma System with SmCo Ring Magnet
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2004-07-15
著者
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OHASHI Ken
Shin-Etsu Chemical Co., Ltd.
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Koyama Fumio
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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MATSUTANI Akihiro
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Yamakage Hirokazu
Shin-etsu Chemical Co. Ltd.
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OHTSUKI Hideo
Samco International Inc.
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YOKOYAMA Tomonori
Shin-Etsu Chemical Co., Ltd.
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