Micromachined Semiconductor Vertical Cavity for Temperature Insensitive Surface Emitting Lasers and Optical Filters

概要

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We propose a micromachined vertical cavity resonator enabling temperature insensitive operation for surface emitting lasers or optical add/drop filters.The strain-induced displacement from differential thermal expansion is used to compensate the wavelength shift caused by temperature variation.Also, a wavelength-trimming technology using the same principle with percise strain control is suggested.The possibility of a drastic reduction in the temperature sensitivity of wavelengths, as well as precise wavelength adjustment, is presented.We fabricated a micromachined vertical cavity filter with a GaA1As/GaAs multilayer reflector, which is mechanically tuned by differential thermal expansion.We observed a large negative temperature coefficient of the resonant wavelength.It is demonstrated that its temperature dependence can be widely controlled by the proposed concept.The possibility of temperature-insensitive operation is discussed.
社団法人応用物理学会の論文
2000-03-30