2×2 Multiwavelength Micromachined AIGaAs/GaAs Vertical Cavity Filter Array with Wavelength Control Layer
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概要
- 論文の詳細を見る
We have demonstrated a novel 2×2 multiwavelength micromachined vertical cavity filter array consisting of a pair of AlGaAs/GaAs distributed Bragg reflectors(DBR). The 2×2 multiwavelength micromachined vertical cavity filter array with a wavelength span of 12nm was fabricated by partly etching off a GaAs wavelength control layer loaded on the top surface of a device. The resonant wavelength can be adjusted by controlling the thickness of the wavelength control layer of each filter in the 2D array.
- 社団法人応用物理学会の論文
- 2000-07-01
著者
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Koyama Fumio
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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Iga Kenichi
Precision & Intelligence Lab., Tokyo Institute of Technology
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Amano T
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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NISHIYAMA Nobuhiko
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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AMANO Takeru
Precision & Intelligence Laboratory, Tokyo Institute of Technology
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Nishiyama N
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Koyama Fumio
Precision And Intelligence Laboratory Microsystem Research Center Tokyo Institute Of Technology
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