Design and Fabrication of Double-Cavity Tunable Filter Using Micromachined Structure
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2003-07-15
著者
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Koyama Fumio
Microsystem Research Center, P&I Lab., Tokyo Institute of Technology
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Kondo T
Technology Development Division Victor Company Of Japan Ltd. (jvc)
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Arai Masakazu
Microsystem Research Center P&i Laboratory Tokyo Institute Of Technology
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MATSUTANI Akihiro
Microsystem Research Center, P&I Laboratory, Tokyo Institute of Technology
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KONDO Takashi
Microsystem Research Center, Precision & Intelligence Laboratory, Tokyo Institute of Technology
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JANTO Wiganes
Microsystem Research Center, Precision and Interlligence Laboratory, Tokyo Institute of Technology
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AMANO Takeru
Microsystem Research Center, Precision and Interlligence Laboratory, Tokyo Institute of Technology
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