Zero Temperature Coefficient Surface-Acoustic-Wave Delay Lines on AlN/Al_2O_3
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概要
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We have investigated the temperature dependence of surface acoustic wave (SAW) delay time on AlN films grown by metalorganic chemical vapor deposition (MO-CVD) on the basal plane of sapphire (Al_2O_3). The temperature coefficient of delay for AlN/Al_2O_3 structures for SAW propagation along the [11^^-00] Al_2O_3 direction decreased with increasing kH, where k is the wave number and H is the thickness of AlN films. We have succeeded in realizing zero temperature coefficient SAW delay lines at a certain value of kH.
- 社団法人応用物理学会の論文
- 1982-05-20
著者
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Tsubouchi Kazuo
Research Institute Of Electrical Communicaiton Tohoku University
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Mikoshiba Nobuo
Research Institute Of Electorical Communication Tohoku University
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SUGAI Kazuyoshi
Research Institute of Electrical Communication, Tohoku University
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Sugai Kazuyoshi
Research Institute Of Electrical Communication Tohoku University
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TSUBOUCHI Kazuo
Research Institute of Electric Communication (RIEC), Tohoku University
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