Surface Acoustic Wave Properties of Atomically Flat-Surface Aluminum Nitride Epitaxial Film on Sapphire
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概要
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We have investigated the surface acoustic wave (SAW) properties of atomically flat-surface (0001)aluminum nitride on a (0001)sapphire (AlN/$\alpha$-Al2O3) combination. SAW propagated along [$1\bar{2}10$]AlN/[$1\bar{1}00$]$\alpha$-Al2O3 and [$10\bar{1}0$]AlN/[$11\bar{2}0$]$\alpha$-Al2O3. SAW velocity was measured to be approximately 1.0% higher than that of a conventionally calculated curve. The dispersion of SAW velocity as a function of normalized thickness (kH) was as low as 1.3%. The measured temperature coefficient of delay was 9 ppm/°C at kH values of 5.9 and 9.9. The propagation loss in the case of using an atomically flat-surface AlN film was lower by one order of magnitude than that using a conventional AlN film. The propagation loss at 5.172 GHz was measured to be 0.0053 dB/$\lambda$.
- 2005-06-15
著者
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Kameda Suguru
Research Institute Of Electrical Communication Tohoku University
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Nakase Hiroyuki
Research Institute Of Electrical Communicaiton Tohoku University
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Shibata Tomohiko
Ngk Insulators Ltd.
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Aota Yuji
Research Institute Of Electrical Communication Tohoku University
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Isota Yoji
Research Institute Of Electrical Communication Tohoku University
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Uehara Kensei
Research Institute Of Electrical Communication Tohoku University
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Tsubouchi Kazuo
Research Institute Of Electrical Communicaiton Tohoku University
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Shibata Tomohiko
NGK Insulators, Ltd., Suda-cho 2-56, Mizuho-ku, Nagoya 467-8530, Japan
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Nakase Hiroyuki
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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TSUBOUCHI Kazuo
Research Institute of Electric Communication (RIEC), Tohoku University
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Uehara Kensei
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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Tsubouchi Kazuo
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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KAMEDA Suguru
Research Institute of Electric Communication (RIEC), Tohoku University
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Kameda Suguru
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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Isota Yoji
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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Aota Yuji
Research Institute of Electrical Communication, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan
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