Effect of Oxidation Amount on Gradual Switching Behavior in Reset Transition of Al/TiO2-Based Resistive Switching Memory and Its Mechanism for Multilevel Cell Operation

スポンサーリンク

概要

• 論文の詳細を見る

• To analyze and explain the gradual reset switching property of the bipolar switching resistive random access memory (RRAM) for multilevel cell (MLC) operation, the effect of the amount of plasma oxidation on the gradual reset switching behavior of the Al/TiO2-based RRAM cell structure is investigated. The device that undergoes plasma oxidation in a shorter time has a better ON/OFF current (I_{\text{ON}}/I_{\text{OFF}}) ratio and shows increased ON current (I_{\text{ON}}). The device that undergoes long plasma oxidation occasionally shows the step reset switching behavior because of the thick conductive filament formation in the ON state. This is clearly explained by the different conduction mechanisms during the ON state.

• 2012-04-25

著者

• Ryoo Kyung-chang

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Computer Science Seoul National University

• Oh Jeong-hoon

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Computer Science Seoul National University

• Jung Sunghun

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Computer Science Seoul National University

• Ryoo Kyung-Chang

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea

• Oh Jeong-Hoon

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Jung Sunghun

  Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering, Seoul National University, Seoul 151-742, Republic of Korea

• Park Yongjik

  DRAM Process Architecture Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd., Hwasung, Gyeonggi 445-701, Republic of Korea

• Park Byung-Gook

  Inter-University Semiconductor Research Center (ISRC) and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul 151-742, Republic of Korea

関連論文

• Side-Gate Design Optimization of 50nm MOSFETs with Electrically Induced Source/Drain
• Side-gate Length Optimization for 50nm Induced Source/Drain MOSFETs
• Nanoscale SONOS Flash Memories(Session B6 Si-Devices II)(2004 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))
• Nanoscale SONOS Flash Memories(Session B6 Si-Devices II)(2004 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))
• Characteristic of Dual-Gate Single Electron Transistor (DG-SET) with extended channel using shallow doping and sidewall patterning for suppressing MOS current(Session 9B : Nano-Scale devices and Physics)
• A New Cone-Type 1T DRAM Cell(Session 2A : Memory 1)
• A New Cone-Type 1T DRAM Cell(Session 2A : Memory 1)
• Characteristic of Dual-Gate Single Electron Transistor (DG-SET) with extended channel using shallow doping and sidewall patterning for suppressing MOS current(Session 9B : Nano-Scale devices and Physics)
• Nanoscale Multi-Line Patterning Using Sidewall Structure
• Single-Electron MOS Memory with a Defined Quantum Dot Based on Conventional VLSI Technology
• Single-Electron Transistors with Sidewall Depletion Gates on a Silicon-On-Insulator Nano-Wire
• Single Electron Memory with a Defined Poly-Si Dot Based on Conventional VLSI Technology
• Room Temperature Coulomb Oscillation of a Single Electron Switch with an Electrically Formed Quantum Dot and Its Modeling
• Independent Gate Twin-bit SONOS Flash Memory with Split-gate Effect(Session 8A : Memory 2)
• Design and Simulation of Self-Aligned Vertical Island Single Electron Transistor (VI-SET) with Electrical Tunneling Barrier
• Study on Dependence of Self-Boosting Channel Potential on Device Scale and Doping Concentration in 2-D and 3-D NAND-Type Flash Memory Devices
• Design and Simulation of Self-Aligned Vertical Island Single Electron Transistor (VI-SET) with Electrical Tunneling Barrier
• Study on Dependence of Self-Boosting Channel Potential on Device Scale and Doping Concentration in 2-D and 3-D NAND-Type Flash Memory Devices
• Charge Injection Path of Bottom-Contact Organic Thin-Film Transistors(Session4B: Emerging Devices II)
• Design of Vertical Nonvolatile Memory Device Considering Gate-Induced Barrier Lowering (GIBL)(Session4A: Nonvolatile Memory)
• 3-dimensional Terraced NAND (3D TNAND) Flash Memory(Session4A: Nonvolatile Memory)
• Recessed Channel Dual Gate Single Electron Transistors (RCDG-SETs) for room temperature operation(Session3: Emerging Devices I)
• Charge Injection Path of Bottom-Contact Organic Thin-Film Transistors(Session4B: Emerging Devices II)
• Design of Vertical Nonvolatile Memory Device Considering Gate-Induced Barrier Lowering (GIBL)(Session4A: Nonvolatile Memory)
• 3-dimensional Terraced NAND (3D TNAND) Flash Memory(Session4A: Nonvolatile Memory)
• Recessed Channel Dual Gate Single Electron Transistors (RCDG-SETs) for room temperature operation(Session3: Emerging Devices I)
• Self-Aligned Dual-Gate Single-Electron Transistors (DG-SETs)
• An Analytic Current-Voltage Equation for Top-contact OTFTs Including the Effects of Variable Series Resistance
• Low Hysteresis Organic Thin-Film Transistors and Inverters with Hybrid Gate Dielectric
• Pentacene TFTs Fabricated by High-aspect Ratio Metal Shadow Mask
• Threshold Voltage Roll-off Mechanisms in SONOS Flash Memory in Retention Mode Including Trapped Charge Redistribution Effect(Session 2A : Memory 1)
• Independent Gate Twin-bit SONOS Flash Memory with Split-gate Effect(Session 8A : Memory 2)
• Threshold Voltage Roll-off Mechanisms in SONOS Flash Memory in Retention Mode Including Trapped Charge Redistribution Effect(Session 2A : Memory 1)
• Multi-level reading method by using PCI (Paired Cell Interference) in vertical NAND flash memory
• Multi-level reading method by using PCI (Paired Cell Interference) in vertical NAND flash memory
• Simulation of Retention Characteristics in Double-Gate Structure Multi-bit SONOS Flash Memory(Session4A: Nonvolatile Memory)
• Simulation of Retention Characteristics in Double-Gate Structure Multi-bit SONOS Flash Memory(Session4A: Nonvolatile Memory)
• Analyses on Current Characteristics of 3-D MOSFET Determined by Junction Doping Profiles for Nonvolatile Memory Devices(Novel MOSFET Structures,Fundamentals and Applications of Advanced Semiconductor Devices)
• Capacitorless DRAM Cell with Highly Scalable Surrounding Gate Structure
• Analyses on Current Characteristics of 3-D MOSFET Nonvolatile Memory Devices Determined by Junction Doping Profiles(Session 7A Silicon Devices IV,AWAD2006)
• Analyses on Current Characteristics of 3-D MOSFET Nonvolatile Memory Devices Determined by Junction Doping Profiles(Session 7A Silicon Devices IV,AWAD2006)
• Analyses on Current Characteristics of 3-D MOSFET Nonvolatile Memory Devices Determined by Junction Doping Profiles
• Simulation Study on Dependence of Channel Potential Self-Boosting on Device Scale and Doping Concentration in 2-D and 3-D NAND-Type Flash Memory Devices
• Simulation of Gate-All-Around Tunnel Field-Effect Transistor with an n-Doped Layer
• Simulation of Retention Characteristics in Double-Gate Structure Multi-Bit SONOS Flash Memory
• 3-Dimensional Terraced NAND (3D TNAND) Flash Memory-Stacked Version of Folded NAND Array
• Recessed Channel Dual Gate Single Electron Transistors (RCDG-SETs) for Room Temperature Operation
• Application of the Compact Channel Thermal Noise Model of Short Channel MOSFETs to CMOS RFIC Design
• Characterization of 2-bit Recessed Channel Memory with Lifted-Charge Trapping Node (L-CTN) Scheme
• Establishing Read Operation Bias Schemes for 3-D Pillar Structure Flash Memory Devices to Overcome Paired Cell Interference (PCI)
• Full-swing pentacene organic inverter with long-channel driver and short-channel load
• A Highly Scalable Split-Gate SONOS Flash Memory with Programmable-Pass and Pure-Select Transistors for Sub-90-nm Technology
• Silicon Quantum Tunneling Devices - FIBTET and MOSET
• Indium Doped nMOSFETs and Buried Channel pMOSFETs with n^+ Polysilicon Gate
• Channel Doping Engineering with Indium as an Alternative p-Type Dopant
• Nanoscale Poly-Si Line Formation and Its Uniformity
• Nanoscale Poly-Si Line Formation and Its Uniformity
• Design and Simulation of Asymmetric MOSFETs(Junction Formation and TFT Reliability,Fundamentals and Applications of Advanced Semiconductor Devices)
• Novel Gate-All-Around MOSFETs with Self-Aligned Structure
• Multi-Functionality of Novel Structured Tunneling Devices
• Junction Leakage Characteristics of Shallow Trench Isolation (STI) with Nitrogen Pile-Up Sidewall Oxide(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
• Junction Leakage Characteristics of Shallow Trench Isolation (STI) with Nitrogen Pile-Up Sidewall Oxide(AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices))
• Design and Simulation of Asymmetric MOSFETs(Session 7A Silicon Devices IV,AWAD2006)
• Design and Simulation of Asymmetric MOSFETs(Session 7A Silicon Devices IV,AWAD2006)
• Design and Simulation of Asymmetric MOSFETs
• Reverse-Order Source/Drain with Double Offset Spacer (RODOS) for Sub-5Onm Low-Power and High-Speed MOSFET Design(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)
• Reverse-Order Source/Drain with Double Offset Spacer (RODOS) for Sub-50nm Low-Power and High-Speed MOSFET Design (AWAD2003 (Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices))
• Side-Gate Design for 50nm Electrically Induced Source/Drain MOSFETs
• Side-gate Length Optimization for 50nm Induced Source/Drain MOSFETs
• Design Consideration for Vertical Nonvolatile Memory Device Regarding Gate-Induced Barrier Lowering (GIBL)
• Design and simulation of single hole transistor with tunneling barrier formed by fixed charge (Electron devices: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Design and simulation of single hole transistor with tunneling barrier formed by fixed charge (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
• Investigation of Threshold Voltage Disturbance Caused by Programmed Adjacent Cell in Virtual Source/Drain NAND Flash Memory
• Novel U-Shape Resistive Random Access Memory Structure for Improving Resistive Switching Characteristics
• Non-Quasi-Static Modeling of Silicon Nanowire Metal–Oxide–Semiconductor Field-Effect Transistor and Its Model Verification up to 1 THz
• Investigation of Field Concentration Effects in Arch Gate Silicon–Oxide–Nitride–Oxide–Silicon Flash Memory
• Fin and Recess-Channel Metal Oxide Semiconductor Field Effect Transistor for Sub-50 nm Dynamic Random Access Memory Cell
• Program/Erase Model of Nitride-Based NAND-Type Charge Trap Flash Memories
• Room-Temperature Operation of a Single-Electron Transistor Made by Oxidation Process Using the Recessed Channel Structure
• Dual Gate Single-Electron Transistors with a Recessed Channel and Underlapped Source/Drain Structure
• Fabrication of Highly Scaled Silicon Nanowire Gate-All-Around Metal–Oxide–Semiconductor Field Effect Transistors by Using Self-Aligned Local-Channel V-gate by Optical Lithography Process
• Extended Word-Line NAND Flash Memory
• Silicon-Based Dual-Gate Single-Electron Transistors for Logic Applications
• Random Telegraph Signal-Like Fluctuation Created by Fowler–Nordheim Stress in Gate Induced Drain Leakage Current of the Saddle Type Dynamic Random Access Memory Cell Transistor
• Extraction of Interface-States Energy Distribution in Nitrided and Pure Gate Dielectrics for Metal Oxide Semiconductor Field Effect Transistor Applications
• Accurate Extraction of Excess Channel Thermal Noise Coefficient in Berkeley Short-Channel Insulated Gate Field-Effect Transistor Model 4
• Reset Current Reduction with Excellent Filament Controllability by Using Area Minimized and Field Enhanced Unipolar Resistive Random Access Memory Structure (Special Issue : Solid State Devices and Materials (2))
• Effect of Oxidation Amount on Gradual Switching Behavior in Reset Transition of Al/TiO-Based Resistive Switching Memory and Its Mechanism for Multilevel Cell Operation (Special Issue : Solid State Devices and Materials (2))
• Areal and Structural Effects on Oxide-Based Resistive Random Access Memory Cell for Improving Resistive Switching Characteristics (Special Issue : Solid State Devices and Materials (2))
• Self-Aligned Dual-Gate Single-Electron Transistors
• Design Guideline of Si-Based L-Shaped Tunneling Field-Effect Transistors
• Novel Protruded-Shape Unipolar Resistive Random Access Memory Structure for Improving Switching Uniformity through Excellent Conductive Filament Controllability
• Areal and Structural Effects on Oxide-Based Resistive Random Access Memory Cell for Improving Resistive Switching Characteristics
• Variation of Threshold Voltage and ON-Cell Current Caused by Cell Gate Length Fluctuation in Virtual Source/Drain NAND Flash Memory
• Effects of Conductive Defects on Unipolar RRAM for the Improvement of Resistive Switching Characteristics
• Novel Three Dimensional (3D) NAND Flash Memory Array Having Tied Bit-line and Ground Select Transistor (TiGer)
• Comparative Study on Top- and Bottom-Source Vertical-Channel Tunnel Field-Effect Transistors
• Study on Threshold Voltage Control of Tunnel Field-Effect Transistors Using V_T-Control Doping Region
• Effect of Oxidation Amount on Gradual Switching Behavior in Reset Transition of Al/TiO2-Based Resistive Switching Memory and Its Mechanism for Multilevel Cell Operation
• Design of Thin-Body Double-Gated Vertical-Channel Tunneling Field-Effect Transistors for Ultralow-Power Logic Circuits

もっと見る 閉じる

スポンサーリンク