Effects of Substrate Clamping on Electrical Properties of Polycrystalline Piezoelectric Films
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概要
- 論文の詳細を見る
To clarify the effects of substrate clamping on electrical properties of polycrystalline piezoelectric films, microstructures, crystalline structures, and electrical properties of aerosol deposition (AD)-processed Pb(Zr,Ti)O3 (PZT) films were evaluated as a function of firing temperature and compared with those of AD-processed bulk specimens formed from the same starting powder. It was found that there are two different effects of substrate clamping on electrical properties in polycrystalline AD-processed PZT films. 90° domain wall motion is severely limited and makes little contribution to dielectric and piezoelectric responses due to an in-plane compressive stress state, resulting in significantly lower dielectric constant and field-induced strain. Furthermore, the $c$-domain distribution is increased by irreversible 90° domain wall motion from the $a$-domain to the $c$-domain due to an in-plane compressive stress during cooling through the phase transition temperature, resulting in higher remanent polarization.
- 2009-09-25
著者
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Nakajima Mitsumasa
Department of Applied Physics, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku-ku, Tokyo 162-8601, Japan
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Nakajima Mitsumasa
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
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Miyoshi Tetsu
FUJIFILM Corporation, Kaisei, Kanagawa 258-8577, Japan
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Funakubo Hiroshi
Department of Innovative and Engineered Material, Tokyo Institute of Technology, Yokohama 226-8503, Japan
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Miyoshi Tetsu
FUJIFILM Corporation
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