プラズマCVMによる機能材料の切断加工 : 内周刃型切断加工装置の試作とその切断加工特性

概要

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For cutting the functional material, a mechanical machining method which applied cutting and grinding is generally used. Therefore, a deformed layer is left in the cut surface, and an another process for removing the deformed layer is required in order to restore the original performance of the functional materials. Plasma CVM (Chemical Vaporization Machining) which cannot leave deformed layer theoretically was applied to the cutting, and the equipment with high speed rotary inner blade electrode was developed, and machining characteristics using this equipment are described. Improving the cutting speed is carried out by sufflcient supply of the reactant gas to the machining gap between the electrode and the work and by sufflcient decomposition of supplied reactant gas. And, decreasing the kerf loss is carried out by the localization of the plasma generation.
2001-02-05