EEM(Elastic Emission Machining)プロセスにおける微粒子表面の形態が加工表面に及ぼす影響

概要

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EEM (elastic emission machining) is a precise surface preparation technique utilizing chemical reactions between the surfaces of work and powder particle. The silica powder particles are employed as reactive species of the EEM process. In order to investigate the influence of the surface morphology of the silica powder particles on the processed surface quality and removal rate, two kinds of silica powder particles were prepared and applied to smooth Si(001) surface. The particle morphology was observed and characterized by transmission electron microscopy (TEM) and atomic force microscopy (AFM). Processed surfaces were observed by AFM and evaluated by power spectral density (PSD) analysis based on the AFM measurement data. We found a correlation between the roughness reduction properties and the surface morphology of the employed powder particles.
社団法人精密工学会の論文
2005-06-05