高精度X線ミラーのための干渉計を利用した形状計測システムの開発

概要

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A figure measurement system with a stitching method has been developed for evaluation and fabrication of the ultraprecise hard X-ray mirror optics. This system was constructed by two interferometers. One is the Michelson-type microscopic interferometer which is improved to keep the focus distance within 0.1μm. Another is the Fizeau's interferometer employed to compensate stitching error in the long spatial wavelength range. To estimate the absolute accuracy in this figure measurement system, the reflection X-ray intensity distributions of flat and asphericl mirrors, which are fabricated by us, predicted by wave-optical simulation based on measured profile and compared with actually observed distributions. As the result, they are in good agreements. These agreements prove that the developed system has sub-nanometer absolute accuracy in all the spatial wavelength range longer than 0.5mm, because sub-nanometer figure error in those spatial wavelength ranges are known to affect reflection X-ray intensity distributions.
社団法人精密工学会の論文
2003-06-05