高分解能硬X線顕微鏡のためのミラーマニピュレータの開発 : 硬X線領域における50nm以下の回折限界集光の実現

概要

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To develop hard X-ray microscopy with high spatial resolution, development of focusing optical system is the most important. Kirkpatrick and Baez mirrors are promising focusing devices for X-ray due to their capability of highly efficient and energy-tunable focusing. However, it is difficult to adjust the alignment of two mirrors precisely in a short time because the mirrors have a multi-degree-of-freedom that should be adjusted. To align mirrors precisely and rapidly, relationships between mirror-positioning errors and focal sizes were investigated using two types of simulators: a ray-trace simulator and a wave-optical simulator. On the basis of the results, a mirror manipulator was developed achieving optimum K-B mirrors setup. Using the manipulator, hard-X-ray diffraction- limited focusing was realized with a size less than 50nm at 15keV at 1km long beamline of SPring-8.
社団法人精密工学会の論文
2006-07-05