数値制御EEM(Elastic Emission Machining)加工システムの開発 : nmオーダでの加工精度の評価

概要

論文の詳細を見る
To develop the ultraprecision figuring system is very important and strongly required in many scientific fields. The Inirrors for synchrotron radiation X-ray facilities or Euv (extreme ultraviolet) Iithography system are re-quired to have atomically smoothed surface and extremely high figure accuracy with the order of nanometer range. EEM that has been developed by authors has been known to be able to prepare the many kinds of optical components with the atomically smoothed surface without any crystallographic damage. On the other hand, sev-eral basic researches are performed to evaluate the possibilities of the visualization of numerically controlled EEM system for the ultraprecision figure corrections. In this work, a new type of EEM head, that is for the transportation of ultrafine powders, utilizing a jet flow of the ultrapure water has been developed for the numerically con-trolled figuring system to realize the good controllability and stability of machining properties such as relnoval rate and the processed surface qualities. A new EEM system for the figuring practically required optical compo-nents described above has been constructed, tested and concluded to have sufficiently good performances for the ultraprecision figuring with the nanometer accuracy.
社団法人精密工学会の論文
2001-04-05