EEM(Elastic Emission Machining)プロセスにおける加工液がSi(001)表面のマイクロラフネスに及ぼす影響

概要

論文の詳細を見る
EEM is a surface removal process in the mixture fluid of ultrapure water and silica powder particles. In this study, in order to clarify the influence of the mixture on the morphological change resulting from the etching in the fluid, the surface morphology and the etching on Si(001) surface after immersion in the mixture fluid were examined in detail. The etching on Si(001) surface in the fluid scarcely proceeds for 70 hours, although the etching in ultrapure water proceeds constantly. The surface morphology after immersion in the fluid seems to be the same as that before immersion from the result of the power spectral density (PSD) analysis. From these results, surface morphology on Si(001) in the fluid was found to be preserved.
社団法人精密工学会の論文
2005-05-05