鉄-コバルト多層膜の磁気特性

概要

論文の詳細を見る
Fe-Co multilayered films with about 3000Å thick have been deposited by an opposed targets type of high rate sputtering apparatus. The low angle X-ray diffraction diagram shows that the films with layer period d_<layer> above 10Å have layered structure. However, the film with d_<layer> below 45Å has only bcc crystal structure in the film. But as d_<layer> increases above 70Å, hcp and fcc phase along with bcc phase can be detected in the film. While, the mean crystallite size <D> decreases steeply with an increase of d_<layer>, which suggests that the layered structure suppresses the crystal growth in the film. The film have large saturation magnetization 1800 emu/cc, which depends little on the d_<layer>. 0n the other hand, the uniaxial magnetic anisotropy energy Ku induced in the film by a magnetic field during deposition and coercive force Hc of the film with t_<Fe>/t_<Co> of 1/3 and l decreases steeply with an increase of d_<layer>. And the film with d_<layer> about 60Å has the lowest value of Hc of 8 0e.
東京工芸大学の論文
1989-01-15