Design Concepts of Single-Layer Resists for Vacuum Ultraviolet Lithography
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概要
- 論文の詳細を見る
We investigated the possible use of single-layer resists in vacuum ultraviolet (VUV) lithography. The transmittances in the VUV region of commonly used polymers for photoresists were almost the same. These values were about 20% at 157 nm per 1000Å-thickness at most. The transmittance at 157 nm of a poly (p-hydroxystyrene) (PHS)-type polymer was slightly increased by halogenation of the aromatic group. Negative working behavior was observed for PHS-type resists. It is thought that both crosslinking and deprotection occurred in PHS-type polymers. A methacrylate-type resist showed high contrast due to the photodecomposition of the base polymer and photo-deprotection in addition to acidic deprotection. It was estimated that the resolution capability of this resist was 80 nm lines and spaces (L/S) (λ157 nm, NA 0.65) using a PROLITH/3D lithography simulator with experimental dissolution data.
- 社団法人応用物理学会の論文
- 1999-12-30
著者
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SHIRAI Masamitsu
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University
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Kishimura Sinji
Association Of Super-advanced Electronics Technologies:(present Address)ulsi Technology Development
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Kishimura Shinji
Ulsi Laboratory Mitsubishi Electric Corporation:semiconductor Group System Lsi Division
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Sasago M
Matsuisita Electric Industrial Co. Ltd. Kyoto Jpn
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Sasago Masaru
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Matsuo Takahiro
Matsushita Electric Industrial Co. Ltd. (panasonic)
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TSUNOOKA Masahiro
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University
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Sasago M
Assoc. Super‐advanced Electronics Technol. Yokohama Jpn
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Katsuyama Akiko
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Katsuyama Akiko
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Tsunooka M
Osaka Prefecture Univ. Osaka Jpn
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Shirai Masamitsu
Department Of Applied Chemistry Osaka Prefecture University
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Tsunooka Masahiro
Department Of Applied Chemistry Graduate School Of Engineering Osaka Prefecture University
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Shirai Masamitsu
Department Of Applied Chemistry College Of Engineering Osaka Prefecture University
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Tsunooka Masahiro
Department Of Applied Chemistry Collage Of Engineering University Of Osaka Prefecture
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