Direct Measurement of Sheath Electric Field Distribution in Front of Substrate in Electron Cyclotron Resonance Plasma by Laser-Induced Fluorescence Technique
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-02-01
著者
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渡辺 正裕
東京工業大学大学院総合理工学研究科
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ODA Toshiatsu
Faculty of Engineering, Hiroshima University
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Oda Toshiatsu
Faculty Of Engineering Hiroshima Kokusai Gakuin University
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Watanabe M
Hiroshima Univ. Higashi‐hiroshima Jpn
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WATANABE Mahiko
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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TAKIYAMA Ken
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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Watanabe Mahiko
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Takiyama K
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Takiyama Ken
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Watanabe M
Nec Corp. Ibaraki Jpn
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