Ferrite Core Effects in a 13.56 MHz Inductively Coupled Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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WATANABE Masahiro
Dept. of Electronics and Applied Physics, Tokyo Inst. of Tech.
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Collins G
Colorado State Univ. Colorado Usa
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Watanabe M
Hiroshima Univ. Higashi‐hiroshima Jpn
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Collins George
Dept. Of Electrical Engineering Colorado State University
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Watanabe Mahiko
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Watanabe M
Nec Corp. Ibaraki Jpn
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Lloyd Shane
Dept. of Electrical Engineering, Colorado State University
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Shaw Denis
Dept. of Electrical Engineering, Colorado State University
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Shaw Denis
Dept. Of Electrical Engineering Colorado State University
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Lloyd Shane
Dept. Of Electrical Engineering Colorado State University
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WATANABE Masahiko
Dept. Anatomy, Hokkaido Univ.
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Watanabe Masahiro
Dept. Of Electronics And Applied Physics Tokyo Inst. Of Tech.
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