Spatial Distribution of He Metastable Atoms in Electron Cyclotron Resonance Plasma
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概要
- 論文の詳細を見る
Axial profile of HeI metastable (21S) atom density was measured along an electron cyclotron resonance (ECR) plasma flow for plasma processing by polarized laser-induced fluorescence (LIF) spectroscopy. A new development in the LIF method was made to avoid laser stray light, which involved observation of fluorescence due to forbidden excitation by electric quadrupole transition. It was found that the metastable (21S) atom density produced was as high as 1011 cm-3 near the outlet of the plasma flow. Doppler profiles of the LIF excitation were measured to determine drift velocity of atoms in the plasma. The production mechanism of metastable atoms was briefly discussed.
- 1997-07-30
著者
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Oda Toshiatsu
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Toyota Hiroshi
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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Watanabe Mahiko
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Takiyama Ken
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Takiyama Ken
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University,
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Watanabe Mahiko
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University,
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Toyota Hiroshi
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University,
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