Spatial Distribution of He Metastable Atoms in Electron Cyclotron Resonance Plasma
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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Oda Toshiatsu
Department Of Applied Physics Faculty Of Engineering Hiroshima University
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Oda Toshiatsu
Faculty Of Engineering Hiroshima Kokusai Gakuin University
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WATANABE Mahiko
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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TAKIYAMA Ken
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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Toyota Hiroshi
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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