Degradation of Activation on Si-Implanted GaAs Crystal Wafers by Mechanical Surface Damages

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-11-20

著者

• Watanabe M

  Hiroshima Univ. Higashi‐hiroshima Jpn

• OTOKI Yoohei

  Advanced Research Center, Hitachi Cable, Ltd.

• KUMA Shoji

  Advanced Research Center, Hitachi Cable, Ltd.

• OKUBO Seiichi

  Hitaka Works, Hitachi Cable, Ltd.

• WATANABE Masatoshi

  Metal Research Laboratory, Hitachi Cable, Lid.

• SHINZAWA Shoji

  Metal Research Laboratory, Hitachi Cable, Lid.

• OTOKI Yoohei

  Metal Research Laboratory, Hitachi Cable, Lid.

• KUMA Shoji

  Metal Research Laboratory, Hitachi Cable, Lid.

• Kuma S

  Advanced Research Center Hitachi Cable Ltd.

• Otoki Yoohei

  Advanced Research Center Hitachi Cable Ltd.

• Okubo Seiichi

  Takasago Branch Hitaka Works Hitachi Cable Ltd.

• Shinzawa Shoji

  Metal Research Laboratory Hitachi Cable Lid.

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