Degradation of Activation on Si-Implanted GaAs Crystal Wafers by Mechanical Surface Damages
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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Watanabe M
Hiroshima Univ. Higashi‐hiroshima Jpn
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OTOKI Yoohei
Advanced Research Center, Hitachi Cable, Ltd.
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KUMA Shoji
Advanced Research Center, Hitachi Cable, Ltd.
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OKUBO Seiichi
Hitaka Works, Hitachi Cable, Ltd.
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WATANABE Masatoshi
Metal Research Laboratory, Hitachi Cable, Lid.
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SHINZAWA Shoji
Metal Research Laboratory, Hitachi Cable, Lid.
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OTOKI Yoohei
Metal Research Laboratory, Hitachi Cable, Lid.
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KUMA Shoji
Metal Research Laboratory, Hitachi Cable, Lid.
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Kuma S
Advanced Research Center Hitachi Cable Ltd.
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Otoki Yoohei
Advanced Research Center Hitachi Cable Ltd.
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Okubo Seiichi
Takasago Branch Hitaka Works Hitachi Cable Ltd.
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Shinzawa Shoji
Metal Research Laboratory Hitachi Cable Lid.
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