Infrared Polarized Reflection Spectra of SrTiO_3 Thin Films on Metal/Si
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概要
- 論文の詳細を見る
The dielectric properties in the infrared region of SrTiO_3 thin film on Pd/Si were studied using reflectance spectra of radiation polarized parallel to the incident plane. The absorption bands of LO (optical phonon) modes increase linearly with increasing incident angle. Maximum sensitivity can be obtained using an incident angle of about 60〜85°. There is sufficient sensitivity at the film thickness of less than 10 nm. These results suggest that p-polarized reflection spectroscopy is a promising technique for estimating dielectric properties for very thin SrTiO_3 films on metal/Si.
- 社団法人応用物理学会の論文
- 1992-10-01
著者
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Myoren Hiroaki
Department Of Electrical Engineering Faculty Of Engineering Hiroshima University
-
Myoren Hiroaki
Department Of Electrical And Electronic Systems Faculty Of Engineering Saitama University
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Matsumoto Takeshi
Department Of Biomechanical Engieering Graduate School Of Engineering Scien
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Osaka Yukio
Department Of Electrical Engineering Faculty Of Engineering Hiroshima University
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Matsumoto Takeshi
Department Of Biology Faculty Of Science Kumamoto University
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