Changes of DLTS Spectrum with Gold Concentration and Gold-Diffusion Temperature in N-Type Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-09-20
著者
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Yoshida M
Functional Materials Research Laboratories Nec Corporation
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Yoshida M
Yoshida Semiconductor Lab. Fukuoka Jpn
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TOMOKAGE Hajime
Department of Electronics, Fukuoka University
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YOSHIDA Masayuki
Kyushu Institute of Design
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MOROOKA Masami
Department of Electrical Engineering, Fukuoka Institute of Technology
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Tomokage H
Fukuoka Univ. Fukuoka Jpn
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Tomokage Hajime
Department Of Electronics Fukuoka University
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Tomokage Hajime
Department Of Electronics Faculty Of Engineering Fukuoka University
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Tomokage Hajime
Department Of Electrical Engineering Faculty Of Engineering Kyushu University
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Yoshida M
National Institute Of Advanced Industrial And Science Technology (aist)
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師岡 正美
福岡工業大学電気工学科
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Morooka Masami
Department Of Electrical Engineering Fukuoka Institute Of Technology
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