Impurity Diffusion in Silicon Based on the Pair Diffusion Model and Decrease in Quasi-Vacancy Formation Energy. Part One: Phosphorus
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-11-15
著者
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Arai Eisuke
Ntt Lsi Laboratories
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YOSHIDA Masayuki
Kyushu Institute of Design
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Yoshida Masayuki
Kyushu Institute Of Design:(present Address)yoshida Semiconductor Laboratory
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