Configuration of a Manufacturing Line for Mixed Production of Ultra-Short TAT LSIs and Low-Cost LSIs
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概要
- 論文の詳細を見る
We propose a method for configuring LSI manufacturing lines so that they can not only be used to manufacture low-cost LSIs in bulk quantities but also can be used to manufacture small lots with ultra-short TAT. This is achieved by adding a relatively small amount of single-wafer processing equipment to a existing conventional processing line, and therefore involves minimum investment.
- 社団法人電子情報通信学会の論文
- 1995-03-25
著者
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Arai E
Department Of Engineering Physics Electronics And Mechanics Nagoya Institute Of Technology
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Arai E
Nagoya Inst. Technol. Nagoya Jpn
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Arai E
Japan Oil Gas And Metals National Corp. Kawasaki‐shi Jpn
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Arai Eisuke
Ntt Lsi Laboratories
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Nakamura Shinji
NTT LSI Laboratories
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Sakurai Tetsuma
NTT Electronics Technology Corporation
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Kojima Ayano
NTT Advanced Technology Corporation
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Nakamura S
Networking Res. Labs. Nec Corporation
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Sakurai Tetsuma
Ntt Electronics Technology
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