Passivation of Deep Levels in 3C-SiC on Si by a Hydrogen Plasma Treatment
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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KATO Masashi
Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology
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ICHIMURA Masaya
Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology
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Kato Masatune
Department Of Physics Faculty Of Science Hiroshima University
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Tanaka Y
Department Of Surgery Tokai University School Of Medicine
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Kato M
Toyota Central R&d Laboratories Inc.
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Tokuda Y
Aichi Inst. Technol. Toyota Jpn
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Tokuda Yutaka
Depertment Of Electronics Aichi Institute Of Technology
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Tokuda Yutaka
Department Of Surgery Tokai University School Of Medicine
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ARAI Eisuke
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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Arai E
Department Of Engineering Physics Electronics And Mechanics Nagoya Institute Of Technology
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Arai E
Nagoya Inst. Technol. Nagoya Jpn
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Kato M
Japan Atomic Energy Res. Inst. Ibaraki Jpn
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Kato Masatsune
Department Of Applied Physics Faculty Of Engineering Tohoku University
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OKUMURA Tsugunori
Department of Electronics and Information Engineering, Tokyo Metropolitan University
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YAMADA Norihide
Hewlett-Packard Laboratories
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Tanaka Yasuhiko
Department Of Ophthalmology School Of Medicine Keio University
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Yamada N
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Kato M
Advanced Research Laboratory Hitachi Ltd.
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SOBUE Fumitaka
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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YAMADA Noboru
Power Device Laboratory, Electronic Device Division, Toyota Central Research and Development Laborat
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Sobue Fumitaka
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Okumura Tsugunori
Department Of Electrical And Electronic Engineering Graduate School Of Science And Engineering Tokyo
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Ichimura M
Department Of Engineering Physics Electronics And Mechanics Nagoya Institute Of Technology
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Tokuda Yutaka
Department Of Breast And Endocrine Surgery Tokai University School Of Medicine
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Kato Masashi
Department Of Bioenvironmental Medicine Graduate School Of Medicine Chiba University
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Yamada N
Yonezawa Women's College Of Yamagata Prefecture
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Ichimura Masaya
Department Of Electrical Ad Computer Engineering Nagoya Institute Of Technology
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Arai Eisuke
Department Of Electrical Ad Computer Engineering Nagoya Institute Of Technology
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Ichimura Masaya
Department Of Electrical & Computer Engineering Nagoya Institute Of Technology
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Kato Masashi
Department Of Applied Biological Chemistry Fuculty Of Agriculture Meijo University
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Kato Masashi
Department Of Applied Biological Chemistry Faculty Of Agriculture Meijo University
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Kato Masashi
Department of Applied Physics, Graduate School of Engineering, Tohoku University
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