Sacrificial Anodic Oxidation of 6H-SiC : Semiconductors

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2001-11-01

著者

• KATO Masashi

  Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology

• ICHIMURA Masaya

  Department of Engineering Physics, Electronics and Mechanics, Nagoya Institute of Technology

• Kato Masatune

  Department Of Physics Faculty Of Science Hiroshima University

• Kato M

  Toyota Central R&d Laboratories Inc.

• ARAI Eisuke

  Department of Electrical and Computer Engineering, Nagoya Institute of Technology

• Arai E

  Department Of Engineering Physics Electronics And Mechanics Nagoya Institute Of Technology

• Arai E

  Nagoya Inst. Technol. Nagoya Jpn

• Kato M

  Japan Atomic Energy Res. Inst. Ibaraki Jpn

• Kato Masatsune

  Department Of Applied Physics Faculty Of Engineering Tohoku University

• Kato M

  Advanced Research Laboratory Hitachi Ltd.

• Ichimura M

  Department Of Engineering Physics Electronics And Mechanics Nagoya Institute Of Technology

• Kato Masashi

  Department Of Bioenvironmental Medicine Graduate School Of Medicine Chiba University

• Ichimura Masaya

  Department Of Electrical Ad Computer Engineering Nagoya Institute Of Technology

• Arai Eisuke

  Department Of Electrical Ad Computer Engineering Nagoya Institute Of Technology

• Ichimura Masaya

  Department Of Electrical & Computer Engineering Nagoya Institute Of Technology

• Kato Masashi

  Department Of Applied Biological Chemistry Fuculty Of Agriculture Meijo University

• Kato Masashi

  Department Of Applied Biological Chemistry Faculty Of Agriculture Meijo University

• Kato Masashi

  Department of Applied Physics, Graduate School of Engineering, Tohoku University

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