Characterization of Thin Bonded Silicon-on-Insulator Structures by the Microwave Photocomductivity Decay Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-07-01
著者
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ARAI Eisuke
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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ICHIMURA Masaya
Center for Cooperative Research, Nagoya Institute of Technology
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Morita Etsuro
Mitsubishi Materials Silicon Co. Ltd.
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Ichimura Masaya
Center For Cooperative Research Nagoya Institute Of Technology
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Makino Takamitsu
Central Research Laboratory
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Usami A
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Usami Akira
Department Of Electronics Nagoya Institute Of Technology
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Ichimura M
Nagoya Inst. Technol. Nagoya Jpn
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MAKINO Takanori
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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ASAKURA Hideki
Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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Asakura Hideki
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Makino T
Central Research Laboratory
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Makino Takanori
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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Arai Eisuke
Department Of Electrical Ad Computer Engineering Nagoya Institute Of Technology
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Usami Akira
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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MORITA Etsuro
Mitsubishi Moterials Silicon Co., Ltd.
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USAMI Akira
Department of Applied Chemistry, Seikei University
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