Critical Dimension Measurement in Nanometer Scale by Using Scanning Probe Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-07-15
著者
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Nagase M
Ntt Basic Research Laboratories Ntt Corporation
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NAGASE Masao
NTT LSI Laboratories
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NAMATSU Hideo
NTT LSI Laboratories
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KURIHARA Kenji
NTT LSI Laboratories
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MAKINO Takahiro
NTT LSI Laboratories, Nippon Telegraph and Telephone Corporation
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Kurihara Kazuaki
Plasma Research Center University Of Tsukuba:(present) Japan Atomic Energy Research Institute
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NGASE Masao
NTT LSI Laboratories
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Kurihara Kazuaki
Fujitsu Laboratories Inorganic Materials & Polymers Laboratory
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Makino Takamitsu
Central Research Laboratory
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Namatsu H
Ntt Basic Res. Lab. Kanagawa Jpn
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Makino T
Central Research Laboratory
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